Thermal spraying Job Shop
Other powders
Some thermal sprayed examples
Contacts
| Type of thermal spraying | Cold spray |
| Sprayed material | Cu |
| Purpose of thermal spraying | Electric conductivity |
| Substrate | Al based |
| Remarks | Coating thickness: approx 8 mm |
Glass encased electrode ozonizer for ozone making machine
| Type of thermal spraying | Plasma thermal spray coating in atmospheric pressure, inner diameter spraying gun |
| Sprayed material | Al |
| Purpose of thermal spraying | Electric conductivity |
| Substrate | Pyrex glass |
| Remarks | Substrate material: IDø76.5 x L1,450mm Thermal spray coating thickness: 80µm |
Semi-conductor production equipment, such as electrostatic chuck, baffle plate, etc.
| Type of thermal spraying | Plasma thermal spray coating in atmospheric pressure, inner diameter spraying gun |
| Sprayed material | Alumina, Alumina titania, Yttria (Yttrium) |
| Purpose of thermal spraying | Improvement of plasma resistance property, electrical insulation improved, wafer chuck force improved, contamination prevention properties improved, etc. |
| Substrate | Aluminum, Stainless Steel, Sintered Alumina Body, etc. |
| Remarks | Post process: Filling process, griding, lapping, embossing |
Temperature adjusting plate for wafer track
| Type of thermal spraying | Plasma thermal spray coating in atmospheric pressure, inner diameter spraying gun |
| Sprayed material | Alumina, copper |
| Purpose of thermal spraying | Electrical insulation, Low temperature resistance, humidity resistance |
| Substrate | Cu + plating |
| Remarks | Filling process |
Heatsink boards for power modules
| Type of thermal spraying | Plasma thermal spray coating in atmospheric pressure, inner diameter spraying gun |
| Sprayed material | Alumina, copper |
| Purpose of thermal spraying | Electrical insulation, Low temperature resistance, humidity resistance |
| Substrate | Copper plus plating, alumina nitride, etc. |
| Remarks | Filling process |