Thermal spraying Job Shop
Insulating properties
Some thermal sprayed examples
Speaker baffle ring
| Type of thermal spraying | Plasma Thermal Spray at atmospheric pressure |
| Sprayed material | Alumina |
| Purpose of thermal spraying | Corrosion resistance, electrical insulation, contamination prevention |
| Substrate | Al based |
| Remarks | Thermal spray coating thickness: 200µm Parts for plasma etching equipment |
Laser electrode
| Type of thermal spraying | Plasma Thermal Spray at atmospheric pressure |
| Sprayed material | Alumina |
| Purpose of thermal spraying | Electrical insulation, electric discharge prevention |
| Substrate | Quartz glass |
| Remarks | Thermal spray coating thickness: 100~200µm |
Semi-conductor production equipment, such as electrostatic chuck, baffle plate, etc.
| Type of thermal spraying | Plasma Thermal Spray at atmospheric pressure |
| Sprayed material | Alumina, Alumina titania, Yttria (Yttrium) |
| Purpose of thermal spraying | Improvement of plasma resistance property, electrical insulation improved, wafer chuck force improved, contamination prevention properties improved, etc. |
| Substrate | Aluminum, Stainless Steel, Sintered Alumina Body, etc. |
| Remarks | Post process: Filling process, griding, lapping, embossing |
Temperature adjusting plate for wafer track
| Type of thermal spraying | Plasma Thermal Spray at atmospheric pressure |
| Sprayed material | Alumina, copper |
| Purpose of thermal spraying | Electrical insulation, Low temperature resistance, humidity resistance |
| Substrate | Copper plus plating |
| Remarks | Filling process |
Heat sink circuit board for power module
| Type of thermal spraying | Plasma Thermal Spray at atmospheric pressure |
| Sprayed material | Alumina, copper |
| Purpose of thermal spraying | Electrical insulation, Low temperature resistance, humidity resistance |
| Substrate | Copper plus plating, alumina nitride, etc. |
| Remarks | Filling process |
Ceramic thermal spraying roll
| Type of thermal spraying | Post process: Filling process, griding, lapping, embossing |
| Sprayed material | Alumina |
| Purpose of thermal spraying | Voltage resistance properties 20 kV |
| Substrate | Steel based |
| Remarks | Grinding process |
Baffle plate
| Type of thermal spraying | Post processes: Filling process, grinding, lapping |
| Sprayed material | Alumina |